• DocumentCode
    3787086
  • Title

    RF MEMS theory, design, and technology [Book Review]

  • Author

    J.J. Shea

  • Volume
    20
  • Issue
    6
  • fYear
    2004
  • Firstpage
    65
  • Lastpage
    65
  • Keywords
    "Book reviews","Radiofrequency microelectromechanical systems","Switches","Varactors","Inductors","Fabrication","Microwave technology","Semiconductor films","Noise shaping","Semiconductor device noise"
  • Journal_Title
    IEEE Electrical Insulation Magazine
  • Publisher
    ieee
  • ISSN
    0883-7554
  • Type

    jour

  • DOI
    10.1109/MEI.2004.1367526
  • Filename
    1367526
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3787086