DocumentCode :
3787490
Title :
Guest Editorial Special Section on Materials-Related Manufacturing Issues in the Nanochip Era
Author :
R. Singh;S. Tyagi;A. Shimazaki;C.L. Claeys;S.-H. Chen;R.P.S. Thakur
Volume :
18
Issue :
1
fYear :
2005
Firstpage :
1
Lastpage :
4
Keywords :
"Manufacturing","Dielectric materials","Semiconductor device manufacture","Silicon","High K dielectric materials","Optical materials","Physics","USA Councils","Costs","Materials science and technology"
Journal_Title :
IEEE Transactions on Semiconductor Manufacturing
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2004.841835
Filename :
1393037
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3787490
