3788059

Introduction to the Special Issue on High-/spl kappa/ Dielectric Reliability

J.F. Conley;G. Bersuker;P.M. Lenahan

5

1

2005

3

4

"Special issues and sections","Electron traps","MOSFETs","Dielectric materials","Materials reliability","Semiconductor device reliability","Extrapolation","MOS devices","Predictive models","Stress"

IEEE Transactions on Device and Materials Reliability

ieee

1530-4388

jour

10.1109/TDMR.2005.847999

1435383