• DocumentCode
    3788059
  • Title

    Introduction to the Special Issue on High-/spl kappa/ Dielectric Reliability

  • Author

    J.F. Conley;G. Bersuker;P.M. Lenahan

  • Volume
    5
  • Issue
    1
  • fYear
    2005
  • Firstpage
    3
  • Lastpage
    4
  • Keywords
    "Special issues and sections","Electron traps","MOSFETs","Dielectric materials","Materials reliability","Semiconductor device reliability","Extrapolation","MOS devices","Predictive models","Stress"
  • Journal_Title
    IEEE Transactions on Device and Materials Reliability
  • Publisher
    ieee
  • ISSN
    1530-4388
  • Type

    jour

  • DOI
    10.1109/TDMR.2005.847999
  • Filename
    1435383