DocumentCode
3788059
Title
Introduction to the Special Issue on High-/spl kappa/ Dielectric Reliability
Author
J.F. Conley;G. Bersuker;P.M. Lenahan
Volume
5
Issue
1
fYear
2005
Firstpage
3
Lastpage
4
Keywords
"Special issues and sections","Electron traps","MOSFETs","Dielectric materials","Materials reliability","Semiconductor device reliability","Extrapolation","MOS devices","Predictive models","Stress"
Journal_Title
IEEE Transactions on Device and Materials Reliability
Publisher
ieee
ISSN
1530-4388
Type
jour
DOI
10.1109/TDMR.2005.847999
Filename
1435383
Link To Document