DocumentCode :
3788059
Title :
Introduction to the Special Issue on High-/spl kappa/ Dielectric Reliability
Author :
J.F. Conley;G. Bersuker;P.M. Lenahan
Volume :
5
Issue :
1
fYear :
2005
Firstpage :
3
Lastpage :
4
Keywords :
"Special issues and sections","Electron traps","MOSFETs","Dielectric materials","Materials reliability","Semiconductor device reliability","Extrapolation","MOS devices","Predictive models","Stress"
Journal_Title :
IEEE Transactions on Device and Materials Reliability
Publisher :
ieee
ISSN :
1530-4388
Type :
jour
DOI :
10.1109/TDMR.2005.847999
Filename :
1435383
Link To Document :
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