CMOS Compatible Fabrication Processes for the Digital Micromirror Device

Author

Cuiling Gong ; Hogan, Tim

Author_Institution

Dept. of Eng., Texas Christian Univ., Fort Worth, TX, USA

Volume

2

Issue

3

fYear

2014

fDate

May-14

Firstpage

27

Lastpage

32

Abstract

DLP® technology has been widely used in the display products since it was first introduced to the world in 1996 by Texas Instruments. Projectors powered by DLP® technology range from cinema projectors that light up large movie theater screens to palm-sized “Pico” projectors. The heart of the technology is the digital micromirror device (DMD) that features an addressable array of up to 8 million microscopic mirrors. DMDs are fabricated using standard semiconductor processing equipment. However due to the unique nature of MOEMS application and digital operation of the DMDs, special CMOS-compatible fabrication processes have been developed to produce highly reflective digital micromirrors with robust operation margin and long term reliability. This paper will present an overview of the fabrication processes of the DMDs.

Keywords

CMOS digital integrated circuits; microfabrication; micromirrors; CMOS compatible fabrication processes; digital micromirror device; long term reliability; operation margin; Fabrication; Fasteners; Films; Metals; Micromirrors; Resists; DLP; DMD; Microelectromechanical devices; fabrication; spatial light modulators;

fLanguage

English

Journal_Title

Electron Devices Society, IEEE Journal of the

Publisher

ieee

ISSN

2168-6734

Type

jour

DOI

10.1109/JEDS.2014.2309129

Filename

6774433