DocumentCode :
3788791
Title :
Comments on "Influence of epitaxial mounds on the yield of integrated circuits"
Author :
A. Gupta;J.W. Lathrop;T. Yanagawa
Author_Institution :
Clemson University, Clemson, S. C.
Volume :
58
Issue :
12
fYear :
1970
Firstpage :
1960
Lastpage :
1961
Keywords :
"Integrated circuit yield","Frequency","Plasma measurements","Interpolation","Plasma density","Electrons","Resonance","NASA","Design methodology","Laboratories"
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1970.8073
Filename :
1450003
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3788791
