• DocumentCode
    3788791
  • Title

    Comments on "Influence of epitaxial mounds on the yield of integrated circuits"

  • Author

    A. Gupta;J.W. Lathrop;T. Yanagawa

  • Author_Institution
    Clemson University, Clemson, S. C.
  • Volume
    58
  • Issue
    12
  • fYear
    1970
  • Firstpage
    1960
  • Lastpage
    1961
  • Keywords
    "Integrated circuit yield","Frequency","Plasma measurements","Interpolation","Plasma density","Electrons","Resonance","NASA","Design methodology","Laboratories"
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1970.8073
  • Filename
    1450003
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3788791