DocumentCode
378902
Title
Session 26 overview MEMS and displays [breaker page]
Volume
1
fYear
2002
fDate
7-7 Feb. 2002
Firstpage
424
Lastpage
425
Abstract
Summary form only given. Start of the above-titled section of the conference proceedings record.
Keywords
Accelerometers; CMOS image sensors; CMOS process; CMOS technology; Chemical technology; Displays; Gyroscopes; Micromechanical devices; Paper technology; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-7335-9
Type
conf
DOI
10.1109/ISSCC.2002.993113
Filename
993113
Link To Document