DocumentCode :
378902
Title :
Session 26 overview MEMS and displays [breaker page]
Volume :
1
fYear :
2002
fDate :
7-7 Feb. 2002
Firstpage :
424
Lastpage :
425
Abstract :
Summary form only given. Start of the above-titled section of the conference proceedings record.
Keywords :
Accelerometers; CMOS image sensors; CMOS process; CMOS technology; Chemical technology; Displays; Gyroscopes; Micromechanical devices; Paper technology; Thermal sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7335-9
Type :
conf
DOI :
10.1109/ISSCC.2002.993113
Filename :
993113
Link To Document :
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