A gas detection system on a single CMOS chip comprising capacitive, calorimetric, and mass-sensitive microsensors

Author

Hagleitner, C. ; Lange, D. ; Kerness, N. ; Hierlemann, A. ; Brand, O. ; Baltes, H.

Author_Institution

Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland

Volume

1

fYear

2002

fDate

7-7 Feb. 2002

Firstpage

430

Abstract

A single-chip chemical microsensor system fabricated in industrial 0.8 /spl mu/m CMOS technology includes three different polymer-coated micromachined transducers. The chip forms an integral part of a handheld unit to detect volatile organics. On-chip circuitry includes signal conditioning, A/D-converters, filters, digital controller, and serial bus interface (I/sup 2/C).

Keywords

CMOS integrated circuits; capacitive sensors; gas sensors; micromachining; microsensors; polymer films; 0.8 micron; A/D-converter; CMOS technology; calorimetric microsensor; capacitive microsensor; digital controller; filter; gas detection system; handheld unit; mass-sensitive microsensor; polymer-coated micromachined transducer; serial bus interface; signal conditioning; single-chip chemical microsensor; volatile organic compound; CMOS technology; Chemical industry; Chemical technology; Chemical transducers; Electrical equipment industry; Gas detectors; Microsensors; Plastics industry; Polymers; Textile industry;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-7335-9

Type

conf

DOI

10.1109/ISSCC.2002.993116

Filename

993116