Title :
A smart CMOS wind sensor
Author :
Makinwa, K.A.A. ; Huijsing, J.H.
Author_Institution :
Delft Univ. of Technol., Netherlands
Abstract :
A 2-D thermal flow sensor for measurement of wind speed and direction is integrated with interface electronics on a single chip. Three thermal /spl Sigma//spl Delta/ modulators control and digitize the flow-dependent heat distribution in the sensor. Errors in wind speed and direction are \n\n\t\t
Keywords :
CMOS integrated circuits; atmospheric measuring apparatus; flow measurement; intelligent sensors; microsensors; sigma-delta modulation; wind; /spl Sigma//spl Delta/ modulator; 2D thermal flow sensor; heat distribution; interface electronics; single chip; smart CMOS wind sensor; CMOS technology; Cogeneration; Heating; Intelligent sensors; Pulse modulation; Semiconductor device measurement; Temperature sensors; Thermal sensors; Voltage; Wind speed;
Conference_Titel :
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7335-9
DOI :
10.1109/ISSCC.2002.993117
