DocumentCode
378904
Title
A smart CMOS wind sensor
Author
Makinwa, K.A.A. ; Huijsing, J.H.
Author_Institution
Delft Univ. of Technol., Netherlands
Volume
1
fYear
2002
fDate
7-7 Feb. 2002
Firstpage
432
Abstract
A 2-D thermal flow sensor for measurement of wind speed and direction is integrated with interface electronics on a single chip. Three thermal /spl Sigma//spl Delta/ modulators control and digitize the flow-dependent heat distribution in the sensor. Errors in wind speed and direction are \n\n\t\t
Keywords
CMOS integrated circuits; atmospheric measuring apparatus; flow measurement; intelligent sensors; microsensors; sigma-delta modulation; wind; /spl Sigma//spl Delta/ modulator; 2D thermal flow sensor; heat distribution; interface electronics; single chip; smart CMOS wind sensor; CMOS technology; Cogeneration; Heating; Intelligent sensors; Pulse modulation; Semiconductor device measurement; Temperature sensors; Thermal sensors; Voltage; Wind speed;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-7335-9
Type
conf
DOI
10.1109/ISSCC.2002.993117
Filename
993117
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