• DocumentCode
    3789504
  • Title

    Integrated circuits: Materials, devices and fabrication

  • Author

    C.J. Alajajian

  • Author_Institution
    Clemson University, Clemson, SC
  • Volume
    70
  • Issue
    11
  • fYear
    1982
  • Firstpage
    1373
  • Lastpage
    1374
  • Keywords
    "Fabrication","Bonding","Thin film circuits","Integrated circuit modeling","MOSFET circuits","Silicon","Circuit testing","Integrated circuit packaging","MOS devices","Semiconductor materials"
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1982.12495
  • Filename
    1456763