DocumentCode :
3789766
Title :
VLSI: Technology and design
Author :
D. Sarma
Author_Institution :
University of Cincinnati, Cincinnati, OH
Volume :
75
Issue :
6
fYear :
1987
Firstpage :
861
Lastpage :
862
Keywords :
"Very large scale integration","Fabrication","Paper technology","Laboratories","Hardware","Resists","X-ray lithography","Semiconductor process modeling","Circuit simulation","Frequency"
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1987.13817
Filename :
1458084
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3789766
