• DocumentCode
    3789766
  • Title

    VLSI: Technology and design

  • Author

    D. Sarma

  • Author_Institution
    University of Cincinnati, Cincinnati, OH
  • Volume
    75
  • Issue
    6
  • fYear
    1987
  • Firstpage
    861
  • Lastpage
    862
  • Keywords
    "Very large scale integration","Fabrication","Paper technology","Laboratories","Hardware","Resists","X-ray lithography","Semiconductor process modeling","Circuit simulation","Frequency"
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1987.13817
  • Filename
    1458084
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3789766