DocumentCode

3790075

Title

Special issue on three-dimensional semiconductor device structures

Author

H.C. Nathanson

Author_Institution

Westinghouse, Pittsburgh, PA

Volume

25

Issue

10

fYear

1978

Firstpage

1177

Lastpage

1177

Journal_Title

IEEE Transactions on Electron Devices

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1978.19248

Filename

1479642