• DocumentCode
    3790163
  • Title

    Comments on "Two-dimensional numerical analysis of impurity atom diffusion in semiconductors"

  • Author

    P.C. Murley;R.R. O´Brien

  • Author_Institution
    IBM Corporation, Hopewell Junction, NY
  • Volume
    31
  • Issue
    7
  • fYear
    1984
  • Firstpage
    1005
  • Lastpage
    1005
  • Journal_Title
    IEEE Transactions on Electron Devices
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1984.21650
  • Filename
    1483935
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3790163