DocumentCode

3790781

Title

2004 Best Paper Award

Author

D. Boning

Volume

18

Issue

4

fYear

2005

Firstpage

473

Lastpage

474

Keywords

Awards

Journal_Title

IEEE Transactions on Semiconductor Manufacturing

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2005.858463

Filename

1528556