3791089

Introduction to the Special Issue on Parts per Trillion (ppt) Contamination

R.C. Blish;G. Samuelson;R. Thomas

5

4

2005

621

622

"Special issues and sections","Metrology","Mass spectroscopy","High K dielectric materials","High-K gate dielectrics","Surface contamination","Pollution measurement","Monitoring","Costs","Fluorescence"

IEEE Transactions on Device and Materials Reliability

ieee

1530-4388

jour

10.1109/TDMR.2005.860816

1573676