DocumentCode
3791089
Title
Introduction to the Special Issue on Parts per Trillion (ppt) Contamination
Author
R.C. Blish;G. Samuelson;R. Thomas
Volume
5
Issue
4
fYear
2005
Firstpage
621
Lastpage
622
Keywords
"Special issues and sections","Metrology","Mass spectroscopy","High K dielectric materials","High-K gate dielectrics","Surface contamination","Pollution measurement","Monitoring","Costs","Fluorescence"
Journal_Title
IEEE Transactions on Device and Materials Reliability
Publisher
ieee
ISSN
1530-4388
Type
jour
DOI
10.1109/TDMR.2005.860816
Filename
1573676
Link To Document