Title :
Quasi-planar high-Q millimeter-wave resonators
Author :
K.J. Vanhille;D.L. Fontaine;C. Nichols;D.S. Filipovic;Z. Popovic
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado Univ., Boulder, CO, USA
Abstract :
Several low-profile 250-mum-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements
Keywords :
"Cavity resonators","Resonant frequency","Millimeter wave technology","Copper","Silicon","Coaxial components","Transmission lines","Feeds","Finite element methods","Q factor"
Journal_Title :
IEEE Transactions on Microwave Theory and Techniques
DOI :
10.1109/TMTT.2006.875794
