DocumentCode :
3793169
Title :
Join EDS and get online access
Volume :
15
Issue :
4
fYear :
2006
Firstpage :
1036
Lastpage :
1036
Journal_Title :
Journal of Microelectromechanical Systems
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2006.881923
Filename :
1668201
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3793169
