DocumentCode :
3797111
Title :
Micro Electro Mechanical System Design - [Book Review]
Volume :
22
Issue :
5
fYear :
2006
Firstpage :
59
Lastpage :
59
Keywords :
"Book reviews","Mechanical systems","Micromechanical devices","Silicon","Physics","CMOS technology","Nanoelectronics","Ultra large scale integration","Single electron transistors","Cyclic redundancy check"
Journal_Title :
IEEE Circuits and Devices Magazine
Publisher :
ieee
ISSN :
8755-3996
Type :
jour
DOI :
10.1109/MCD.2006.273009
Filename :
4049890
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3797111
