Fabrication and emitter measurements for a nanoklystron: A novel THz micro-tube source

Author

Manohara, Harish M. ; Siegel, Peter H. ; Marrese, Colleen ; Chang, Baohe ; Xu, Jimmy

Author_Institution

Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA

fYear

2002

fDate

2002

Firstpage

28

Lastpage

29

Abstract

A novel monolithic micro-tube source for submillimeter-wave (300 GHz to 3 THz) power generation is being developed at JPL. The tube takes the form of a simple reflex klystron with dimensions in the micrometer range, fabricated monolithically in silicon using standard MEMS (micro-electro-mechanical systems) fabrication techniques. While different types of cathodes are being considered, the effort has been focused so far on developing highly ordered arrays of carbon nanotubes (CNTs) working as cold field emitters. In this paper we report the progress and some preliminary results on the fabrication of monolithic nanoklystron cavities and CNT-based field emitters.

Keywords

klystrons; submillimetre wave generation; submillimetre wave tubes; vacuum microelectronics; 300 GHz to 3 THz; C; MEMS fabrication; Si; carbon nanotube cathode; field emitter array; monolithic nanoklystron cavity; reflex klystron; submillimeter-wave power generation; terahertz micro-tube source; Carbon nanotubes; Cathodes; Fabrication; Field emitter arrays; Klystrons; Microelectromechanical systems; Micromechanical devices; Power generation; Silicon; Submillimeter wave technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electronics Conference, 2002. IVEC 2002. Third IEEE International

Print_ISBN

0-7803-7256-5

Type

conf

DOI

10.1109/IVELEC.2002.999243

Filename

999243