• DocumentCode
    379920
  • Title

    Integrated cathode testing

  • Author

    Longo, Robert ; Tighe, William ; Harrison, Chuck

  • Author_Institution
    Boeing Electron Dynamic Devices Inc., Torrance, CA, USA
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    302
  • Abstract
    Summary form only given. Comprehensive evaluation of dispenser-type cathodes during development and optimization programs requires a wide range of in-situ diagnostics tests. These tests include Auger surface analysis, cathode activity, cathode current stability, barium evaporation rate, and robustness to poisons. A unique, sophisticated experimental chamber has been developed at EDD for the purpose of evaluating M-cathodes. The apparatus consists of three interconnected vacuum chambers: the insertion chamber, the life test chamber and the specimen test chamber. The insertion chamber can be vented to atmospheric pressure without disturbing either the life test or specimen test chamber. Once loaded, the gate valve to the specimen test chamber can be opened and the cathodes can be transported to a holding platform in the specimen test chamber. This chamber is equipped with an electron gun, Auger spectrometer, secondary electron detector, an ion gun, a bare filament quadrupole mass spectrometer and an anode grid. This permits complete testing of the surface conditions and emission properties in the main chamber.
  • Keywords
    Auger electron spectroscopy; cathodes; electron tube testing; life testing; mass spectrometers; vacuum apparatus; vacuum microelectronics; Auger spectrometer; Auger surface analysis; M-cathodes; anode grid; bare filament quadrupole mass spectrometer; barium evaporation rate; cathode activity; cathode current stability; dispenser-type cathodes; electron gun; gate valve; holding platform; in-situ diagnostics tests; insertion chamber; integrated cathode testing; interconnected vacuum chambers; interval testing; ion gun; life test chamber; poison robustness; secondary electron detector; specimen test chamber; Barium; Cathodes; Detectors; Electrons; Life testing; Mass spectroscopy; Robust stability; Stability analysis; Toxicology; Valves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, 2002. IVEC 2002. Third IEEE International
  • Print_ISBN
    0-7803-7256-5
  • Type

    conf

  • DOI
    10.1109/IVELEC.2002.999390
  • Filename
    999390