3802192

Special Section on the Advanced Semiconductor Manufacturing Conference 2006 (ASMC 2006)

Oliver D. Patterson

20

2

2007

57

58

"Special issues and sections","Semiconductor device manufacture","Pulp manufacturing","Costs","Semiconductor materials","Components, Packaging, and Manufacturing Technology Society","Process control","Manufacturing automation","Electronics industry","Etching"

IEEE Transactions on Semiconductor Manufacturing

ieee

0894-6507

jour

10.1109/TSM.2007.896630

4182426