• DocumentCode
    3802192
  • Title

    Special Section on the Advanced Semiconductor Manufacturing Conference 2006 (ASMC 2006)

  • Author

    Oliver D. Patterson

  • Volume
    20
  • Issue
    2
  • fYear
    2007
  • Firstpage
    57
  • Lastpage
    58
  • Keywords
    "Special issues and sections","Semiconductor device manufacture","Pulp manufacturing","Costs","Semiconductor materials","Components, Packaging, and Manufacturing Technology Society","Process control","Manufacturing automation","Electronics industry","Etching"
  • Journal_Title
    IEEE Transactions on Semiconductor Manufacturing
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2007.896630
  • Filename
    4182426
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3802192