DocumentCode

3806605

Title

Editorial

Author

Richard Muller

Volume

16

Issue

5

fYear

2007

Firstpage

997

Lastpage

998

Journal_Title

Journal of Microelectromechanical Systems

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2007.907964

Filename

4337790