• DocumentCode
    3809143
  • Title

    Interaction of Oxygen Plasma With Aluminium Substrates

  • Author

    Miran Mozetic;Uro Cvelbar;Alenka Vesel;Nika Krstulovic;Slobodan Milosevic

  • Author_Institution
    Plasma Lab., Jozef Stefan Inst., Ljubljana
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    868
  • Lastpage
    869
  • Abstract
    Inductively coupled oxygen plasma is widely used for material processing. Optical emission spectroscopy using fast miniature fiber spectrometer was used for plasma characterization and process monitoring. The images of plasma and accompanying spectra during interaction with aluminium foil are presented.
  • Keywords
    "Oxygen","Aluminum","Plasma applications","Plasma materials processing","Spectroscopy","Plasma measurements","Stimulated emission","Optical pumping","Coils","Glass"
  • Journal_Title
    IEEE Transactions on Plasma Science
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.925383
  • Filename
    4558028
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3809143