Title :
Interaction of Oxygen Plasma With Aluminium Substrates
Author :
Miran Mozetic;Uro Cvelbar;Alenka Vesel;Nika Krstulovic;Slobodan Milosevic
Author_Institution :
Plasma Lab., Jozef Stefan Inst., Ljubljana
Abstract :
Inductively coupled oxygen plasma is widely used for material processing. Optical emission spectroscopy using fast miniature fiber spectrometer was used for plasma characterization and process monitoring. The images of plasma and accompanying spectra during interaction with aluminium foil are presented.
Keywords :
"Oxygen","Aluminum","Plasma applications","Plasma materials processing","Spectroscopy","Plasma measurements","Stimulated emission","Optical pumping","Coils","Glass"
Journal_Title :
IEEE Transactions on Plasma Science
DOI :
10.1109/TPS.2008.925383
