DocumentCode

3809645

Title

Electron-Beam Technology in Microelectronic Fabrication

Author

D.R. Brambley

Volume

129

Issue

2

fYear

1982

fDate

4/1/1982 12:00:00 AM

Firstpage

50

Journal_Title

IEE Proceedings I - Solid-State and Electron Devices

Publisher

iet

ISSN

0143-7100

Type

jour

DOI

10.1049/ip-i-1.1982.0007

Filename

4642604