DocumentCode

3809832

Title

Book review: Transmission Electron Microscopy of Silicon VLSI Circuits and Structures

Author

H. Ahmed

Volume

132

Issue

1

fYear

1985

fDate

2/1/1985 12:00:00 AM

Firstpage

46

Journal_Title

IEE Proceedings I - Solid-State and Electron Devices

Publisher

iet

ISSN

0143-7100

Type

jour

DOI

10.1049/ip-i-1.1985.0011

Filename

4643849