DocumentCode

3809879

Title

VLSI Electronics: Microstructure Science. Volume 12: Silicon Materials

Author

A.F.W. Willoughby

Volume

133

Issue

4

fYear

1986

fDate

8/1/1986 12:00:00 AM

Firstpage

176

Journal_Title

IEE Proceedings I - Solid-State and Electron Devices

Publisher

iet

ISSN

0143-7100

Type

jour

DOI

10.1049/ip-i-1.1986.0035

Filename

4644196