Digital MEMS switch for planar photonic crossconnects

Author

Fan, Li ; Gloeckner, S. ; Dobblelaere, P.D. ; Patra, S. ; Reiley, D. ; King, C. ; Yeh, T. ; Gritters, J. ; Gutierrez, S. ; Loke, Y. ; Harburn, M. ; Chen, R. ; Kruglick, E. ; Wu, M. ; Husain, A.

Author_Institution

OMM Inc., San Diego, CA, USA

fYear

2002

fDate

17-22 Mar 2002

Firstpage

93

Lastpage

94

Abstract

In conclusion we have demonstrated fully nonblocking 16×16 switches in a single chip solution using MEMS fabricated by a surface micro-machining. We have shown how the critical mechanical elements of the MEMS-cell have been chosen to achieve large mechanical movement, high angular repeatability of the movement, and high reliability of the actuation mechanism, which translated into low loss and high reliability of the packaged component. Test results for these components have been presented.

Keywords

micro-optics; micromachining; micromechanical devices; optical communication equipment; optical switches; semiconductor device packaging; telecommunication network reliability; MEMS; MEMS-cell; actuation mechanism; critical mechanical elements; digital MEMS switch; fully nonblocking 16×16 switches; high angular repeatability; high reliability; large mechanical movement; low loss; packaged component; planar photonic crossconnects; single chip solution; surface micro-machining; Assembly; Electrodes; Electrostatic actuators; Magnetic shielding; Micromechanical devices; Microswitches; Mirrors; Optical crosstalk; Optical design; Optical switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communication Conference and Exhibit, 2002. OFC 2002

Print_ISBN

1-55752-701-6

Type

conf

DOI

10.1109/OFC.2002.1036227

Filename

1036227