• DocumentCode
    381747
  • Title

    Mixed nanostructured oxides of Ti and VI-B group elements for gas sensing

  • Author

    Guidi, Vincenzo ; Comini, Elisabetta ; Faglia, Guido ; Ferroni, Matteo

  • Author_Institution
    Dipt. di Fisica, Ferrara Univ., Italy
  • Volume
    1
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    398
  • Abstract
    In this paper we review the gas-sensing properties of Ti, W, and Mo mixed oxides as thin films achieved via reactive sputtering. We focused on the structural characterization of the films, which proved to be an essential tool for optimization of performance.
  • Keywords
    annealing; gas sensors; molybdenum compounds; nanostructured materials; sputter deposition; sputtered coatings; thin films; titanium compounds; tungsten compounds; MoO3; TiO2; VI-B group elements; WO3; gas-sensing properties; mixed nanostructured oxides; reactive sputtering; structural characterization; thin film preparation; Annealing; Argon; Atmosphere; Chemical elements; Gases; Oxidation; Physics; Radio frequency; Semiconductor films; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037124
  • Filename
    1037124
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=381747