Title :
Resistance noise spectroscopy of SnO2 thick-film gas sensors
Author :
Parks, J.M. ; Marquis, B.T. ; Harmer, G.P. ; Schmitt, R.F.
Author_Institution :
Sensor Res. & Dev. Corp., Orono, ME, USA
Abstract :
This paper describes the methods and results of resistance noise spectroscopy applied to SnO2 nanoparticle thick-film sensors operated at temperatures of 200, 300, 400, and 500°C At each temperature, the sensors were exposed to three hits of 50 ppm of NO, H2S, or NH3. Sensor noise was sampled before, during, and after each hit. Initial inspection of the results seemed to show unique responses to each gas. More careful analysis revealed that the spectra were shaped by flicker noise, thermal noise, and signal attenuation. Thermal noise and attenuation are primarily functions of sensor DC resistance. Flicker noise was shown to be partly a function of DC resistance, but could not be directly correlated to DC resistance due to other, undetermined parameters.
Keywords :
flicker noise; gas sensors; semiconductor device noise; semiconductor materials; semiconductor thin films; spectroscopy; thermal noise; thick film devices; tin compounds; 200 to 500 C; H2S; NH3; NO; SnO2; SnO2 thick-film gas sensors; flicker noise; nanoparticle thick-film sensors; resistance noise spectroscopy; sensor DC resistance; sensor noise; signal attenuation; thermal noise; 1f noise; Attenuation; Inspection; Noise shaping; Sensor phenomena and characterization; Signal analysis; Spectroscopy; Temperature sensors; Thermal resistance; Thick film sensors;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037127