DocumentCode :
381751
Title :
Low drift air-gap CMOS-FET gas sensor
Author :
Paris, R. ; Pawel, S. ; Herzer, R. ; Doll, T. ; Kornetzky, Peter ; Gupta, R.P. ; Eranna, G.
Author_Institution :
Inst. of Solid State Electron., Technische Univ. Ilmenau, Germany
Volume :
1
fYear :
2002
fDate :
2002
Firstpage :
421
Abstract :
We developed a low drift CMOS GasFET for a wide variety of gases like H2, NH3 or NO2 combining the advantages of previous CCFET and SGFET concepts. The design comprises an insulated floating electrode structure for hybrid-mounted sensitive gates. The transducer has a low long term drift and temperature coefficient, comparable to a MOSFET, as measurements under real conditions prove.
Keywords :
CMOS integrated circuits; MOSFET; capacitance; gas sensors; stability; GasFET; H2; NH3; NO2; air-gap CMOS-FET gas sensor; hybrid-mounted sensitive gates; insulated floating electrode structure; long term drift; low drift gas sensor; temperature coefficient; Air gaps; Capacitors; Electrodes; FETs; Gas detectors; Insulation; MOSFET circuits; Stability; Temperature sensors; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
Type :
conf
DOI :
10.1109/ICSENS.2002.1037128
Filename :
1037128
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=381751
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