Liquid sensor system using reflecting surface acoustic wave delay lines

Author

Nomura, Tooru ; Saitoh, Atsushi

Author_Institution

Shibaura Inst. of Technol., Tokyo, Japan

Volume

1

fYear

2002

fDate

2002

Firstpage

507

Abstract

A new sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36° YX LiTaO₃ and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a response of the sensor probe. Several experiments were performed to verify the edge reflection type SAW sensor in viscous and ionic liquids. Experimental results showed that the sensor is very suitable for sensing of liquid phase.

Keywords

ionic conductivity; lithium compounds; surface acoustic wave delay lines; surface acoustic wave sensors; viscosity measurement; LiTaO₃; SH-SAW device; amplitude; complete reflection; edge reflection type SAW sensor; ionic liquids; liquid sensor system; phase; reflecting surface acoustic wave delay lines; sensor probe; shear horizontal mode surface acoustic wave; viscous liquids; Acoustic reflection; Acoustic sensors; Acoustic waves; Delay lines; Phase measurement; Probes; Sensor phenomena and characterization; Sensor systems; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2002. Proceedings of IEEE

Print_ISBN

0-7803-7454-1

Type

conf

DOI

10.1109/ICSENS.2002.1037146

Filename

1037146