Title :
GaPO4 crystals for sensor applications
Author :
Worsch, Peter M. ; Krempl, Peter W. ; Wallnöfer, Wolfgang
Author_Institution :
AVL List GmbH, Graz, Austria
Abstract :
The piezoelectric crystal material gallium (ortho) phosphate GaPO4 can be considered to be the "high tech brother of quartz". The high thermal stability up to 970°C and its high sensitivity make GaPO4 a very attractive choice for a wide range of high temperature applications. Furthermore it shows no pyroelectricity, no outgassing and a high electric resistivity to guarantee high precision piezoelectric measurements. GaPO4 offers good temperature compensation for a new generation of crystal microbalances operating at temperatures up to at least 700°C as shown in thermogravimetric and film thickness measurements. It also allows the production of SAW sensors with a very high thermal stability.
Keywords :
compensation; crystal resonators; gallium compounds; microbalances; piezoelectric materials; piezoelectric transducers; surface acoustic wave sensors; thermal analysis; thermal stability; 0 to 970 degC; GaPO4; SAW sensors; crystal microbalances; film thickness measurements; high precision piezoelectric measurements; high temperature applications; piezoelectric crystal material; sensor applications; temperature compensation; thermal stability; thermogravimetric measurements; Crystalline materials; Electric resistance; Electric variables measurement; Piezoelectric films; Piezoelectric materials; Pyroelectricity; Temperature distribution; Temperature sensors; Thermal stability; Thickness measurement;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037166
