Title :
Nanostructured TiO2 thin films prepared by supersonic beams and their application in a sensor array for the discrimination of VOC
Author :
Toccoli, T. ; Boschetti, A. ; Guerini, L. ; Iannotta, S. ; Capone, S. ; Siciliano, P. ; Taurino, A.
Author_Institution :
Centro CNR-ITC Fisica degli Stati Aggregati, CeFSA, Trento, Italy
Abstract :
In this paper, we present the first sensor ever built using films grown by supersonic beam of cluster oxides as sensing material. Supersonic cluster beams, produced by a pulsed micro-plasma cluster source have successfully used to prepare nanocrystalline thin films of TiO2. The sensors, prepared by using different deposition parameters, were suitable for use in a gas sensor array for electronic nose. Sensors showed a quite good response to ethanol, methanol and propanol. Principal component analysis was used as method for testing the array capability in discrimination and recognition of the volatile compounds.
Keywords :
gas sensors; nanostructured materials; plasma deposition; principal component analysis; sensor fusion; titanium compounds; TiO2; VOC; deposition parameters; discrimination; electronic nose; ethanol; gas sensor array; methanol; nanostructured thin films; principal component analysis; propanol; pulsed micro-plasma cluster source; sensor array; supersonic beams; volatile compounds; Electrodes; Gas detectors; Helium; Mechanical factors; Nanoscale devices; Sensor arrays; Sensor phenomena and characterization; Sputtering; Thin film sensors; Valves;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037177
