DocumentCode
381793
Title
Frequency selective sensor arrays for vibration measurement
Author
Scheibner, Dirk ; Wibbeler, Jürgen ; Mehner, Jan
Author_Institution
Chemnitz Univ. of Technol., Germany
Volume
1
fYear
2002
fDate
2002
Firstpage
675
Abstract
Describes a new microsystem for vibration measurement based on frequency selective sensor arrays with electrically tunable band selectivity for the frequency range from 1 to 10 kHz. The band selectivity is achieved by electrostatic forces.
Keywords
electrostatic devices; intelligent sensors; micromechanical resonators; microsensors; sensor fusion; vibration measurement; 1 to 10 kHz; band selectivity; electrically tunable band selectivity; electrostatic forces; frequency selective sensor arrays; microelectromechanical sensors; microresonator; smart sensor; vibration measurement; Chemical technology; Electrostatics; Frequency measurement; Resonance; Resonant frequency; Sensor arrays; Sensor phenomena and characterization; Tensile stress; Tuning; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037183
Filename
1037183
Link To Document