Title :
Array of PZT pyroelectric thick-film sensors for contactless measurement of XY position
Author :
Ferrari, Vittorio ; Ghisla, Alessio ; Marioli, Daniele ; Taroni, Andrea
Author_Institution :
Dip. Elettronica per l´´Automazione, Brescia Univ., Italy
Abstract :
The paper presents the design, fabrication and experimental characterization of a pyroelectric sensor array made by 8×8 pixels of PZT screen printed on an alumina substrate. When an amplitude-modulated light emitting diode (LED) is placed in front of the array and moved in the XY plane parallel to the array surface, the array and the LED respectively work as the reference element and the contactless cursor of a two-dimensional position sensor.
Keywords :
arrays; equivalent circuits; lead compounds; light emitting diodes; position measurement; pyroelectric detectors; readout electronics; thick film devices; 2D position sensor; Al2O3; PZT pyroelectric thick-film sensors; PZT-Al2O3; PbZrO3TiO3-Al2O3; XY position; alumina substrate; amplitude-modulated LED; contactless measurement; fabrication; light emitting diode; pyroelectric sensor array; screen printed PZT; thick-film sensor array; two-dimensional position sensor; Electrodes; Light emitting diodes; Optical arrays; Position measurement; Pyroelectricity; Sensor arrays; Temperature; Thick film sensors; Thick films; Thickness measurement;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037226
