Micromachined nanoprobe and its application

In this paper we described our activity in nano electro mechanical systems (NEMS). Two types of multi-probe devices, one for electrical probes in nano regime, another for manipulation of small particles like DNA, are presented. In the device fabrication, we utilized a common combination process of an anisotropic wet etching of silicon and local oxidation of silicon technique for nano structure fabrication, which enables one to mass-produce nano probe devices.