Title :
A micromachined self-resonant frequency-modulated passive pressure transensor
Author :
Baldi, Antoni ; Choi, Woohyek ; Ziaie, Babak
Author_Institution :
Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA
Abstract :
In this paper, we report on the design, fabrication and testing of a passive pressure transensor. The sensor uses the self-resonant frequency modulation of an integrated coil to detect the pressure variations. This modulation is generated by the displacement of a ferrite core attached to a silicone rubber membrane relative to the coil. This scheme simplifies the packaging of the passive transensor by removing the requirement for a separate capacitor to form the resonator. A 1.37 μH coil having a dimension of 3 mm × 3 mm and 30 turns is used in a prototype design yielding a sensitivity of 34.7 kHz/kPa with a cylindrical ferrite core of 9.5 mm diameter and 0.5 mm height.
Keywords :
coils; frequency modulation; inductors; membranes; micromachining; microsensors; pressure sensors; transponders; 0.5 mm; 3 mm; 4.75 mm; FM; MEMS sensors; fabrication; ferrite core displacement; frequency-modulated pressure transensor; integrated coil; micromachined pressure transensor; packaging; pressure transponder; self-resonant passive transensor; silicone rubber membrane; single pressure-sensitive inductor; Biomembranes; Capacitors; Coils; Fabrication; Ferrites; Frequency modulation; Packaging; Prototypes; Rubber; Testing;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037239
