• DocumentCode
    381825
  • Title

    Broadband acoustical tuning of nano-electromechanical sensors

  • Author

    Beil, F.W. ; Wixforth, Achim ; Blick, Robert H.

  • Author_Institution
    Center for NanoScience & Sekt. Phys., Ludwig-Maximilians-Univ., Munchen, Germany
  • Volume
    2
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    1285
  • Abstract
    For a variety of applications in integrated communication and sensor devices nano-electromechanical systems (NEMS) present a new generation of high frequency components. Up to now conventional excitation mechanisms for NEMS are based either on high magnetic (magnetomotive method) or electric (electromotive method) fields which limits the use of NEMS. We present experiments utilizing a surface acoustic wave (SAW) transducer on GaAs to excite nanomechanical resonators operating at frequencies up to 300 MHz. We show that via SAW full control over the fundamental properties of the resonator sensor is achieved.
  • Keywords
    III-V semiconductors; aluminium compounds; gallium arsenide; microsensors; nanoelectronics; surface acoustic wave resonators; surface acoustic wave transducers; 0 to 300 MHz; AlAs-GaAs; NEMS; SAW transducer; broadband acoustical tuning; nano-electromechanical sensors; nanomechanical resonators; resonator sensor; Acoustic sensors; Acoustic waves; Frequency; Magnetic sensors; Nanoelectromechanical systems; Nanoscale devices; Sensor systems and applications; Surface acoustic wave devices; Surface acoustic waves; Tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037302
  • Filename
    1037302