Title :
Intelligent SOI CMOS integrated circuits and sensors for heterogeneous environments and applications
Author :
Flandre, D. ; Adriaensen, S. ; Afzalian, A. ; Laconte, J. ; Levacq, D. ; Renaux, C. ; Vancaillie, L. ; Raskin, J.P. ; Demeûs, L. ; Delatte, P. ; Dessard, V. ; Picun, G.
Author_Institution :
Res. Center in Micro & Nanoscopic Electron. Devices & Mater. (CeRMiN), Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium
Abstract :
In this paper, we demonstrate how a simple fully-depleted SOI CMOS process can be adapted to provide a wide range of performance compatible with the realization of heterogeneous micropower, high-temperature or RF micro-systems which involve the integration of sensing, analog and digital components. High-temperature and low-voltage examples are discussed.
Keywords :
CMOS integrated circuits; high-temperature electronics; intelligent sensors; micromachining; microsensors; radiofrequency integrated circuits; silicon-on-insulator; RF micro-systems; SOI CMOS integrated circuits; Si; heterogeneous environments; high-temperature devices; intelligent sensors; micromachining; micropower devices; CMOS integrated circuits; CMOS process; CMOS technology; Intelligent sensors; MOSFETs; Magnetic separation; Radio frequency; Silicon on insulator technology; Temperature sensors; Threshold voltage;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037327
