DocumentCode

3820690

Title

European Conference on Ion Implantation

Author

D.R. Chick

Volume

17

Issue

4.5

fYear

1971

Firstpage

178

Lastpage

179

Journal_Title

Electronics and Power

Publisher

iet

ISSN

0013-5127

Type

jour

DOI

10.1049/ep.1971.0110

Filename

5179719