DocumentCode

3820866

Title

Titanium target improves sputter-etching process

Volume

18

Issue

11

fYear

1972

fDate

11/1/1972 12:00:00 AM

Firstpage

394

Journal_Title

Electronics and Power

Publisher

iet

ISSN

0013-5127

Type

jour

DOI

10.1049/ep.1972.0289

Filename

5180010