DocumentCode

3825551

Title

Transmission Electron Microscopy of Silicon VLSI Circuits and Structures

Author

D.J. Barber

Volume

30

Issue

8

fYear

1984

fDate

8/1/1984 12:00:00 AM

Firstpage

641

Journal_Title

Electronics and Power

Publisher

iet

ISSN

0013-5127

Type

jour

DOI

10.1049/ep.1984.0346

Filename

5187054