Fabrication and Characterization of Edge-Conformed Graphene-Silicon Waveguides

Author

Horvath, Cameron ; Bachman, Daniel ; Guangcan Mi ; Vien Van

Author_Institution

Appl. Nanotools Inc., Edmonton, AB, Canada

Volume

27

Issue

6

fYear

2015

fDate

March15, 15 2015

Firstpage

585

Lastpage

587

Abstract

We report a simple and robust method for fabricating graphene-on-silicon waveguides on a silicon-on-insulator (SOI) chip. The waveguide consists of a silicon core covered by a graphene layer whose width exactly conforms with the width of the silicon core and whose length can be precisely controlled. Raman spectroscopy showed that the graphene layer retained its high quality after processing. Transmission measurements of fabricated graphene-on-silicon waveguides showed polarizationdependent propagation losses of 0.03 dB/μm for the transverseelectric (TE) mode and 0.07 dB/μm for the transverse-magnetic (TM) mode, in excellent agreement with theoretical simulations.

Keywords

Raman spectra; elemental semiconductors; graphene; light polarisation; light transmission; optical fabrication; optical losses; optical testing; optical variables measurement; optical waveguides; silicon; silicon-on-insulator; C-Si; Raman spectroscopy; edge-conformed graphene-silicon waveguide characterization; edge-conformed graphene-silicon waveguide fabrication; polarization-dependent propagation losses; silicon-on-insulator chip; transmission measurements; transverse-electric mode; transverse-magnetic mode; Absorption; Graphene; Optical device fabrication; Optical polarization; Optical waveguides; Propagation losses; Silicon; Graphene photonics; graphene photonics; graphene-on-silicon waveguides;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2014.2385757

Filename

7001619