DocumentCode

3845731

Title

Editorial

Author

Richard S. Muller

Volume

18

Issue

6

fYear

2009

Firstpage

1161

Lastpage

1162

Journal_Title

Journal of Microelectromechanical Systems

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2009.2035348

Filename

5337962