Development of a Flexible Robotic System for Multiscale Applications of Micro/Nanoscale Manipulation and Assembly

A flexible robotic system (FRS) developed for multiscale manipulation and assembly from nanoscale to microscale is presented. This system is based on the principle of atomic force microscopy and comprises two individually functionalized cantilevers. After reconfiguration, the robotic system could be used for pick-and-place manipulation from nanoscale to the scale of several micrometers, as well as parallel imaging/nanomanipulation. Flexibilities and manipulation capabilities of the developed system were validated by pick-and-place manipulation of microspheres and silicon nanowires to build 3-D micro/nanoscale structures in ambient conditions. Moreover, the capability of parallel nanomanipulation is certified by high-efficiency fabrication of a 2-D pattern with nanoparticles. Complicated micro/nanoscale manipulation and assembly can be reliably and efficiently performed using the proposed FRS.