3846915

Introducing the Microelectromechanical Systems Interest Group

4

2

2010

"Microelectromechanical systems","Micromechanical devices","Integrated circuit technology","CMOS technology","Mechanical sensors","Silicon","BiCMOS integrated circuits","Microelectronics","Space technology","Chemical and biological sensors"

IEEE Nanotechnology Magazine

ieee

1932-4510

jour

10.1109/MNANO.2010.937225

5472869