Dark current characteristics of GaAs metal-semiconductor-metal (MSM) photodetectors

Calculations of the electron and hole components of dark current in a GaAs metal-semiconductor-metal (MSM) photodetector are presented. A quantum-mechanical model for the electron and hole transport behavior in the contact regions which is used to determine dark current as a function of electric field is developed. The model reduces to a conventional thermionic emission model if an ideal barrier transmission coefficient is assumed. In order to assess the accuracy of the model, photodetectors have been fabricated and tested. Theoretical calculations and experimental data are compared, and good agreement is obtained. Possible modifications to enhance the usefulness of the model are discussed.