DocumentCode
3850463
Title
Visualization of Electron Transport Coefficients in RF Electric and Magnetic Fields Crossed at Arbitrary Angles
Author
Saša Dujko;Ronald D. White;Zoran Lj. Petrovic
Author_Institution
Institute of Physics, University of Belgrade, Belgrade, Serbia
Volume
39
Issue
11
fYear
2011
Firstpage
2560
Lastpage
2561
Abstract
The Boltzmann equation for charged particle swarms in gases subject to arbitrarily oriented spatially homogeneous and time-dependent electric and magnetic fields is solved by a recently developed multiterm theory, and attention is focused on the portrayal of the electron transport properties. Temporal variations of the electron transport data are presented for the Reid ramp model gas in varying configurations of electric and magnetic fields for a fixed field frequency and amplitudes of the electric and magnetic fields.
Keywords
"Radio frequency","Kinetic theory","Distribution functions","Boltzmann equation","Plasmas","Mathematical model","Tensile stress"
Journal_Title
IEEE Transactions on Plasma Science
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2150246
Filename
5776695
Link To Document