Title :
Integrated MEMS-tunable VCSELs with high modulation bandwidth
Author :
B. Kogel;P. Westbergh;A. Haglund;J.S. Gustavsson;A. Larsson
Author_Institution :
Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Goteborg 41296, Sweden
fDate :
6/23/2011 12:00:00 AM
Abstract :
The modulation bandwidth of micromachined tunable VCSELs is typically limited by the parasitic capacitance associated with the large mesa platform for the movable mirror. Presented is a simple technology for wafer-scale integration of tunable VCSELs with low mesa capacitance and high modulation bandwidth. Small signal measurements show a 3dB bandwidth of up to 6 GHz over a tuning range of 18 nm. Digital modulation is demonstrated with error-free data transmission at 5 Gbit/s and eye diagrams at 10 Gbit/s.
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2011.1494
