DocumentCode
3851401
Title
IC failure analysis: magic, mystery, and science
Author
J.M. Soden;R.E. Anderson;C.L. Henderson
Author_Institution
Sandia Nat. Labs., Albuquerque, NM, USA
Volume
14
Issue
3
fYear
1997
Firstpage
59
Lastpage
69
Abstract
Advancing IC and packaging technologies motivate and direct the future of failure analysis. The authors review current tools and techniques and discuss challenges and opportunities created by the industry´s critical need for new diagnosis and failure analysis paradigms.
Keywords
"Failure analysis","Optical microscopy","Magnetic force microscopy","Atomic force microscopy","Optical interconnections","Photonic integrated circuits","Electron beams","Optical imaging","Packaging","Integrated circuit testing"
Journal_Title
IEEE Design & Test of Computers
Publisher
ieee
ISSN
0740-7475
Type
jour
DOI
10.1109/54.605998
Filename
605998
Link To Document