DocumentCode :
3852309
Title :
AIVELA Conference
Volume :
21
Issue :
2
fYear :
2012
Journal_Title :
Journal of Microelectromechanical Systems
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2012.2191183
Filename :
6177251
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3852309